MicroSense Metrology

MicroSense Metrology

MicroSense designs, manufactures and supports a wide range of automated magnetic metrology tools used by the Data Storage & Semiconductor industries. The systems currently available include: Polar Kerr for MRAM and PMR Media, KerrMapper and DiskMapper H7.

  • Polar Kerr for Perpendicular MRAM
  • Polar Kerr for PMR Media
  • KerrMapper S300 and V300
  • DiskMapper H7

MicroSense Polar Kerr System for Perpendicular MRAM
The Polar Kerr System for Perpendicular MRAM manufactured by MicroSense utilizes the polar Magneto-Optical Kerr Effect (MOKE) to characterize the magnetic properties of multi-layer wafers used in the development and manufacturing of perpendicular MRAM.

Utilizing a non-contact, full-wafer measurement technique, the system creates a map of the magnetic properties of entire wafers up to 300 mm. Using the proprietary direct field control technique of MicroSense magnetic metrology tools, the Polar Kerr for MRAM system offers high field capabilities and excellent field resolution to characterize free and pinned layer properties in a single system.

Features of MRAM Polar Kerr System

  • Non-contact mapping of the magnetic properties of perpendicular MRAM wafers up to 300mm
  • Maximum field of ± 2.4 T for full stack measurements; field resolution of 0.05 Oe for free layer measurements in a single system
  • Measurement of patterned magnetic features using integrated high-resolution camera and Optical Pattern Recognition (OPR) software
  • Characterization of multi-layer soft and hard magnetic films

Modular Design

  • Camera-Based Vision System: By utilizing a joystick-based user-friendly software interface, high resolution camera and optics, it is possible to visualize the exact location of the wafer to be measured.
  • Optical Pattern Recognition System: The OPR Module makes it possible to automatically locate and move to structures on a patterned wafer. Using this capability, patterned wafers can be automatically measured without operator involvement.
  • Fully Automated 300 mm EFEM with SECS/GEM Automation: This combined hardware/software option makes the tool fully automated for use in volume production. Using an integrated industry-standard EFEM front-end and SECS/GEM factory automation software, wafers can be measured without having to be manually handled.
  • Field Align (Magnetic Set) Process Step of Full Wafers: This option allows the tool to be used for rapid field alignment, an important process step in perpendicular STT-MRAM, of full wafers at a programmable DC field up to the maximum field of the system.

Polar Kerr System for Perpendicular MRAM Brochure

MicroSense Polar Kerr for PMR Media
The Polar Magneto-Optic Kerr Effect (MOKE) system characterizes the magnetic properties of the perpendicular magnetic recording (PMR) layer immediately after deposition, an important factor in the yield of disk drive media. The full disk, non-contact measurement technique and automated handling make the Polar Kerr system essential for production use and yield improvement. By quickly and accurately measuring the magnetic parameters crucial to PMR media production, the Polar Kerr system improves the ability to control the complex deposition process.

The Polar Kerr system rapidly and automatically generates a map of the magnetic properties of the disk on both sides. The number and location of measurement points and the maximum applied field are user-settable and can be saved in recipe files. The system can simultaneously measure both sides of the disk in less than 20 seconds. In addition it is capable of characterizing the most advanced media, utilizing a user-defined sweep rate and a maximum applied field of ±2.65 T, exceeding any current production requirements and allowing for future generations of PMR media.

Features of PMR Polar Kerr System

  • Non-destructive, non-contact double-sided mapping of the magnetic properties of perpendicular media
  • Rapid process feedback enhances control of the deposition process, measuring Hc, Hn, S, S* and other key properties of the recording layer
  • High-throughput production tool with automated cassette handling
  • Disk Heat option allows temperature-dependent measurements
  • User-selectable laser wavelengths available (red, violet)
  • User-programmable applied field extrema and sweep rate for dynamic coercivity measurements

Polar Kerr System for PMR Brochure

MicroSense KerrMapper S300 and V300
The KerrMapper family of tools utilizes the longitudinal Magneto-Optical Kerr Effect (MOKE) to characterize the magnetic properties of magnetic multi-layer wafers for GMR/TMR heads, MRAM, and other magnetic sensors.

Utilizing a non-contact full-wafer measurement technique, the KerrMapper S300 and V300 systems create a map of the magnetic properties of entire wafers. Both systems are available in a manual-loading or fully-automated configurations for use in R&D and/or production. Using the proprietary direct field control technique of MicroSense magnetic metrology tools, KerrMapper systems offer high field capabilities and low field resolution to characterize free and pinned layer properties in a single system.

Features of KerrMapper Systems

  • Non-contact mapping of the magnetic properties of MRAM, MR, GMR, TMR and other wafers up to 300 mm
  • Vector field capability for measurement of Stoner-Wohlfart astroids, complex bias field and other measurements
  • Automatic skew and angular dispersion mapping for post-deposition and anneal process feedback
  • Measurement of patterned magnetic features using integrated Optical Pattern Recognition (OPR) hardware and software with measurement spot sizes from micron to millimeter range
  • Characterization of multi-layer soft and hard magnetic films

Modular Design

  • Wafer Handling Robot with Pre-Aligner: This combined hardware/software option makes the tool fully automated for use in volume production. Using an integrated industry standard robot and pre-aligner, wafers can be measured without having to be manually handled in a cassette.
  • Camera-Based Vision System: By utilizing a joystick-based user-friendly software interface, high resolution camera and optics, it is possible to visualize the exact location of the wafer to be measured. The vision system is designed to work in conjunction with small and ultra-small laser spot sizes. The pixel size of the wafer location image is less than 2 microns.
  • Optical Pattern Recognition System: The OPR Module makes it possible to automatically locate and move to structures on a patterned wafer. Using this capability, patterned wafers can be automatically measured without operator involvement.

Kerr Mapper S300 and V300 Brochure

MicroSense DiskMapper H7
The DiskMapper H7 system quickly determines the uniformity of the perpendicular recording layer of Heat Assisted Magnetic Recording (HAMR), also called Thermally Assisted Recording (TAR) disks, immediately after deposition, an important factor in the yield of disk drives. Utilizing a custom 7 tesla bi-polar high speed superconducting magnet, the hysteresis loop of any disk location can be measured in less than 3 minutes. By using full cassette automation and double-sided measurement capability, the DiskMapper H7 system is both an R&D and production tool.

By quickly and accurately measuring the magnetic parameters crucial to HAMR/TAR PMR media production, the DiskMapper H7 system improves the ability to keep the deposition process under control. The full disk, non-contact measurement technique and automated handling make the DiskMapper H7 system essential for production use and yield improvement.

Features of DiskMapper H7 Systems

  • Non-destructive, non-contact double-sided mapping of the magnetic properties of HAMR/TAR media
  • Rapid process feedback enhances control of the deposition process, measuring Hc, Hn, S, S* and other key properties of the recording layer
  • High-throughput ± 7 tesla production tool with automated cassette handling
  • Disk Heat option allows temperature-dependent measurements
  • Choice of high sweep rate 7 tesla or lower cost 7 tesla magnet

DiskMapper H7 Brochure