NBM Design – Pulsed Laser Deposition (PLD) Systems

NBM Design

NBM Design – Pulsed Laser Deposition (PLD) Systems

NBM Design is a leading supplier of Pulsed Laser Deposition systems for material scientists and process engineers. Products include both standard and custom systems, as well as stand-alone PLD components. Complete PLD systems with Excimer laser, vacuum systems, multiple target manipulators, and rotating substrate heaters (up to 1200° C) are offered.

Pulsed Laser Deposition (PLD) is a thin film deposition technique that is used to deposit materials onto substrates with minimal setup. A base system consists of a target manipulator and a substrate carrier which is mounted in a vacuum chamber. An excimer laser is used to energize the surface of a target to produce a deposition plume. The plume is typically directed towards the substrate where a thin-film is deposited. Since each shot of the laser is directly related to the amount of material ablated, the deposition rate can be calibrated and controlled very precisely.

The individual components of NBM Design's PLD systems are designed with versatility in mind. Typical components found in a PLD system include a target manipulator, substrate heater, and vacuum chamber. Each component can be configured to meet almost any chamber geometry. In addition, our components can be delivered with automation packages for full computerized control.

NBM Design's PLD systems grant the researcher the ability to perform quick experiments of material combinations to assist in determining the optimum performance characteristics of the deposited thin films. The NBM Design system is designed to be rugged and reliable, offering consistent and reproducible performance.

Reflection High Energy Electron Diffraction (RHEED) systems can be installed into PLD systems for deposition monitoring. Typically, RHEED is performed at very low pressures. A special apparatus is employed that allows the electron gun to be differentially pumped, allowing it to be used in the high partial pressures typical for PLD. Using this technique, vital lattice information can be gathered in real-time, giving the user in-depth information about the film quality.

Fully-integrated PLD RHEED systems include:

NBM Design also offers control packages to automate laser, target, and substrate actions. System packages include a hardware and software bundle that allows customization of the deposition processes.

Pulsed Laser Deposition System Brochure