Contact

Quantum Design Taiwan

Tel:  +886-2-23316108
Fax: +886-2-23316155

Sales

sales@qd-taiwan.com

Service

service@qd-taiwan.com
 
Contact Quantum Design Taiwan Contact Quantum Design Taiwan Locate Quantum Design Taiwan
Models Resources
Benchtop Atomic Layer Deposition Process Systems – GEMStar™

Benchtop Atomic Layer Deposition Process Systems

GEMStar™ ALD Systems

GEMstar's ALD product line deposits low temperature conformal metal, semiconductor and insulating films on planar and high aspect ratio (HAR) structures. These ALD systems are designed for uniform conformal growth of films from precursors that have a CVD growth component.

The uniformity of thin films can determine whether a process or device works. These systems are designed to provide the user with the most uniform films possible, even in challenging HAR through-hole applications.

Models

ARR-40900 GEMStar-6 Benchtop ALD System

The 150mm Ø system deposits low temperature conformal metal, semiconductor and insulating films on planar and high aspect ratio (HAR) structures. It is designed for uniform conformal growth of films from precursors that have a CVD growth component.

ARR-840900 GEMStar-8 Benchtop ALD System

The 200mm Ø system deposits low temperature conformal metal, semiconductor and insulating films on planar and high aspect ratio (HAR) structures. It is designed for uniform conformal growth of films from precursors that have a CVD growth component.

ARR-940900 GEMStar-A Benchtop Controlled Gas Environment Anneal System

The 200mm square system anneals substrates in a vacuum controlled user selectable gas environment.

Supplier Info

Arradiance GEMStar Atomic Layer Deposition Systems

For additional product information:

Visit Our Supplier's Website

Resources

This website may use cookies to ensure you get the best experience on our website.
View our Privacy Policy.

I Understand